Thermal annealing effects on the atomic layer deposited LaAlO3 thin films on Si substrate

Dail Eom, Cheol Seong Hwang, Hyeong Joon Kim, Mann Ho Cho, K. B. Chung

Research output: Contribution to journalArticle

18 Citations (Scopus)

Fingerprint Dive into the research topics of 'Thermal annealing effects on the atomic layer deposited LaAlO<sub>3</sub> thin films on Si substrate'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy