Thermal stability of gallium-doped zinc oxide thin film on glass substrates by an RF sputtering process

Jong Ho Kang; Myung Hyun Lee; Young Soo Lim; Hyoung Seuk Choi; Won Seon Seo; Jung Sik Bang; Hyun Woo Jang; Heon Jin Choi

doi:10.1166/jnn.2013.7732

Thermal stability of gallium-doped zinc oxide thin film on glass substrates by an RF sputtering process

Jong Ho Kang, Myung Hyun Lee, Young Soo Lim, Hyoung Seuk Choi, Won Seon Seo, Jung Sik Bang, Hyun Woo Jang, Heon Jin Choi

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The effects of a heat treatment on the structural and electrical properties of GZO thin films grown by RF magnetron sputtering were investigated. The heat treatment involved temperatures in the range from 200 °C to 500 °C under air. As the temperature was increased, the electrical properties of GZO thin films increased exponentially and the surface morphology was drastically altered. The effect of temperature is discussed based on electrical and structural characterization of the materials.

Original language	English
Pages (from-to)	7180-7183
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	13
Issue number	10
DOIs	https://doi.org/10.1166/jnn.2013.7732
Publication status	Published - 2013 Oct

All Science Journal Classification (ASJC) codes

Bioengineering
Chemistry(all)
Biomedical Engineering
Materials Science(all)
Condensed Matter Physics

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@article{7aa56619167b4091a497d842553bd71b,

title = "Thermal stability of gallium-doped zinc oxide thin film on glass substrates by an RF sputtering process",

abstract = "The effects of a heat treatment on the structural and electrical properties of GZO thin films grown by RF magnetron sputtering were investigated. The heat treatment involved temperatures in the range from 200 °C to 500 °C under air. As the temperature was increased, the electrical properties of GZO thin films increased exponentially and the surface morphology was drastically altered. The effect of temperature is discussed based on electrical and structural characterization of the materials.",

author = "Kang, {Jong Ho} and Lee, {Myung Hyun} and Lim, {Young Soo} and Choi, {Hyoung Seuk} and Seo, {Won Seon} and Bang, {Jung Sik} and Jang, {Hyun Woo} and Choi, {Heon Jin}",

year = "2013",

month = oct,

doi = "10.1166/jnn.2013.7732",

language = "English",

volume = "13",

pages = "7180--7183",

journal = "Journal of Nanoscience and Nanotechnology",

issn = "1533-4880",

publisher = "American Scientific Publishers",

number = "10",

}

TY - JOUR

T1 - Thermal stability of gallium-doped zinc oxide thin film on glass substrates by an RF sputtering process

AU - Kang, Jong Ho

AU - Lee, Myung Hyun

AU - Lim, Young Soo

AU - Choi, Hyoung Seuk

AU - Seo, Won Seon

AU - Bang, Jung Sik

AU - Jang, Hyun Woo

AU - Choi, Heon Jin

PY - 2013/10

Y1 - 2013/10

N2 - The effects of a heat treatment on the structural and electrical properties of GZO thin films grown by RF magnetron sputtering were investigated. The heat treatment involved temperatures in the range from 200 °C to 500 °C under air. As the temperature was increased, the electrical properties of GZO thin films increased exponentially and the surface morphology was drastically altered. The effect of temperature is discussed based on electrical and structural characterization of the materials.

AB - The effects of a heat treatment on the structural and electrical properties of GZO thin films grown by RF magnetron sputtering were investigated. The heat treatment involved temperatures in the range from 200 °C to 500 °C under air. As the temperature was increased, the electrical properties of GZO thin films increased exponentially and the surface morphology was drastically altered. The effect of temperature is discussed based on electrical and structural characterization of the materials.

UR - http://www.scopus.com/inward/record.url?scp=84889009704&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84889009704&partnerID=8YFLogxK

U2 - 10.1166/jnn.2013.7732

DO - 10.1166/jnn.2013.7732

M3 - Article

AN - SCOPUS:84889009704

SN - 1533-4880

VL - 13

SP - 7180

EP - 7183

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

IS - 10

ER -

Thermal stability of gallium-doped zinc oxide thin film on glass substrates by an RF sputtering process

Abstract

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