Thermal stability of gallium-doped zinc oxide thin film on glass substrates by an RF sputtering process

Jong Ho Kang, Myung Hyun Lee, Young Soo Lim, Hyoung Seuk Choi, Won Seon Seo, Jung Sik Bang, Hyun Woo Jang, Heon-Jin Choi

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Abstract

The effects of a heat treatment on the structural and electrical properties of GZO thin films grown by RF magnetron sputtering were investigated. The heat treatment involved temperatures in the range from 200 °C to 500 °C under air. As the temperature was increased, the electrical properties of GZO thin films increased exponentially and the surface morphology was drastically altered. The effect of temperature is discussed based on electrical and structural characterization of the materials.

Original languageEnglish
Pages (from-to)7180-7183
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume13
Issue number10
DOIs
Publication statusPublished - 2013 Oct 1

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All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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