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Thermal stability of nanoscale Ge metal-oxide-semiconductor capacitors with Zr O2 high- k gate dielectrics on Ge epitaxial layers
Jungwoo Oh, Prashant Majhi, Chang Yong Kang, Ji Woon Yang, Hsing Huang Tseng, Raj Jammy
Research output: Contribution to journal › Article › peer-review
23
Citations
(Scopus)