Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition

Jiyoung Chang, Jongbaeg Kim, Byung Kwon Min, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Bimorph nano actuator fabricated with Focused ion beam chemical vapor deposition (FIB-CVD) on MEMS heater is presented. The nano bimorph structure is composed of C14H10 and W(CO)6 and the transferred thermal energy generated from the MEMS heater increases bimorph temperature. Due to the thermal strain mismatch of the two materials, C and W, the nano bimorph bends toward C indicating larger CTE of tungsten containing material. The measured stroke is 600nm projected from top and bimorph actuation is repeated for over 100 times without any indication of degradation of failure under controlled input voltage. Relation between measured stroke, difference in coefficient of thermal expansion (CTE) and temperature rise is derived using Denavit - Hartenberg notation and bimorph structure analysis. ΔCTE is calculated to be 1.87 × 10-6K-1, which is necessary value to design the presented type nano bimorph actuators with different geometry/dimension and to predict their operational conditions and expected performance.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages541-544
Number of pages4
DOIs
Publication statusPublished - 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Chang, J., Kim, J., Min, B. K., & Lin, L. (2007). Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 541-544). [4300187] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300187