Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition

Jiyoung Chang, Jongbaeg Kim, Byung-Kwon Min, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Bimorph nano actuator fabricated with Focused ion beam chemical vapor deposition (FIB-CVD) on MEMS heater is presented. The nano bimorph structure is composed of C14H10 and W(CO)6 and the transferred thermal energy generated from the MEMS heater increases bimorph temperature. Due to the thermal strain mismatch of the two materials, C and W, the nano bimorph bends toward C indicating larger CTE of tungsten containing material. The measured stroke is 600nm projected from top and bimorph actuation is repeated for over 100 times without any indication of degradation of failure under controlled input voltage. Relation between measured stroke, difference in coefficient of thermal expansion (CTE) and temperature rise is derived using Denavit - Hartenberg notation and bimorph structure analysis. ΔCTE is calculated to be 1.87 × 10-6K-1, which is necessary value to design the presented type nano bimorph actuators with different geometry/dimension and to predict their operational conditions and expected performance.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages541-544
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Fingerprint

Focused ion beams
Thermal expansion
Chemical vapor deposition
Actuators
MEMS
Thermal energy
Tungsten
Degradation
Temperature
Geometry
Electric potential

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Chang, J., Kim, J., Min, B-K., & Lin, L. (2007). Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 541-544). [4300187] https://doi.org/10.1109/SENSOR.2007.4300187
Chang, Jiyoung ; Kim, Jongbaeg ; Min, Byung-Kwon ; Lin, Liwei. / Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 541-544
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Chang, J, Kim, J, Min, B-K & Lin, L 2007, Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300187, pp. 541-544, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07/6/10. https://doi.org/10.1109/SENSOR.2007.4300187

Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition. / Chang, Jiyoung; Kim, Jongbaeg; Min, Byung-Kwon; Lin, Liwei.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 541-544 4300187.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - Bimorph nano actuator fabricated with Focused ion beam chemical vapor deposition (FIB-CVD) on MEMS heater is presented. The nano bimorph structure is composed of C14H10 and W(CO)6 and the transferred thermal energy generated from the MEMS heater increases bimorph temperature. Due to the thermal strain mismatch of the two materials, C and W, the nano bimorph bends toward C indicating larger CTE of tungsten containing material. The measured stroke is 600nm projected from top and bimorph actuation is repeated for over 100 times without any indication of degradation of failure under controlled input voltage. Relation between measured stroke, difference in coefficient of thermal expansion (CTE) and temperature rise is derived using Denavit - Hartenberg notation and bimorph structure analysis. ΔCTE is calculated to be 1.87 × 10-6K-1, which is necessary value to design the presented type nano bimorph actuators with different geometry/dimension and to predict their operational conditions and expected performance.

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Chang J, Kim J, Min B-K, Lin L. Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 541-544. 4300187 https://doi.org/10.1109/SENSOR.2007.4300187