Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements

Heon Min Lee, Hong Teuk Kim, Hyung Kyu Choi, Hyung Ki Hong, Don Hee Lee, Jae Young Park, Jong Uk Bu, Euisik Yoon

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of -21dBm, and a phase noise of -110dBc/Hz at an offset frequency of 100kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19MHz/V and 0.24%/°C, respectively, with a resistance of 88.1 ω at room temperature.

Original languageEnglish
Pages (from-to)L85-L87
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume43
Issue number1 A/B
DOIs
Publication statusPublished - 2004 Jan 15

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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