Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements

Heon Min Lee; Hong Teuk Kim; Hyung Kyu Choi; Hyung Ki Hong; Don Hee Lee; Jae Young Park; Jong Uk Bu; Euisik Yoon

doi:10.1143/JJAP.43.L85

Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements

Heon Min Lee, Hong Teuk Kim, Hyung Kyu Choi, Hyung Ki Hong, Don Hee Lee, Jae Young Park, Jong Uk Bu, Euisik Yoon

Yonsei Advanced Science Institute

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of -21dBm, and a phase noise of -110dBc/Hz at an offset frequency of 100kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19MHz/V and 0.24%/°C, respectively, with a resistance of 88.1 ω at room temperature.

Original language	English
Pages (from-to)	L85-L87
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	43
Issue number	1 A/B
DOIs	https://doi.org/10.1143/JJAP.43.L85
Publication status	Published - 2004 Jan 15

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.43.L85

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title = "Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements",

abstract = "In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of -21dBm, and a phase noise of -110dBc/Hz at an offset frequency of 100kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19MHz/V and 0.24%/°C, respectively, with a resistance of 88.1 ω at room temperature.",

author = "Lee, {Heon Min} and Kim, {Hong Teuk} and Choi, {Hyung Kyu} and Hong, {Hyung Ki} and Lee, {Don Hee} and Park, {Jae Young} and Bu, {Jong Uk} and Euisik Yoon",

year = "2004",

month = jan,

day = "15",

doi = "10.1143/JJAP.43.L85",

language = "English",

volume = "43",

pages = "L85--L87",

journal = "Japanese Journal of Applied Physics, Part 2: Letters",

issn = "0021-4922",

number = "1 A/B",

}

Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements. / Lee, Heon Min; Kim, Hong Teuk; Choi, Hyung Kyu; Hong, Hyung Ki; Lee, Don Hee; Park, Jae Young; Bu, Jong Uk; Yoon, Euisik.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 43, No. 1 A/B, 15.01.2004, p. L85-L87.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements

AU - Lee, Heon Min

AU - Kim, Hong Teuk

AU - Choi, Hyung Kyu

AU - Hong, Hyung Ki

AU - Lee, Don Hee

AU - Park, Jae Young

AU - Bu, Jong Uk

AU - Yoon, Euisik

PY - 2004/1/15

Y1 - 2004/1/15

N2 - In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of -21dBm, and a phase noise of -110dBc/Hz at an offset frequency of 100kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19MHz/V and 0.24%/°C, respectively, with a resistance of 88.1 ω at room temperature.

AB - In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of -21dBm, and a phase noise of -110dBc/Hz at an offset frequency of 100kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19MHz/V and 0.24%/°C, respectively, with a resistance of 88.1 ω at room temperature.

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Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements

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