Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements

Heon Min Lee, Hong Teuk Kim, Hyung Kyu Choi, Hyung Ki Hong, Don Hee Lee, Jae Young Park, Jong Uk Bu, Euisik Yoon

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of -21dBm, and a phase noise of -110dBc/Hz at an offset frequency of 100kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19MHz/V and 0.24%/°C, respectively, with a resistance of 88.1 ω at room temperature.

Original languageEnglish
Pages (from-to)L85-L87
JournalJapanese Journal of Applied Physics
Volume43
Issue number1 A/B
DOIs
Publication statusPublished - 2004 Jan 15

Bibliographical note

Funding Information:
Hung Wong is Associate Professor in the Department of Social Work at the Chinese University of Hong Kong. E-mail: hwong@cuhk.edu.hk. Terry T. F. Leung is Assistant Professor in the Department of Applied Social Studies at the City University of Hong Kong. E-mail: ssterry@cityu.edu.hk. The contributors acknowledge the financial support of the Direct Grant from the Chinese University of Hong Kong for this study.

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements'. Together they form a unique fingerprint.

Cite this