Thermally driven torsional micromirrors using pre-bent torsion bar for large static angular displacement

Youngkee Eun, Jongbaeg Kim

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper presents one- and two-degree-of-freedom (DOF) torsional micromirrors driven by in-plane thermal actuators for large static angular motion at low operational voltage. The micromirror actuator is fabricated on a silicon-on-insulator (SOI) wafer using three photomasks to form two different thicknesses on the device layer and to define backside holes. The thin layer beam connected to the thick layer torsion bar is pulled by the in-plane thermal actuator, twisting the torsion bar and therefore inducing angular motion of the mirror. The proposed pre-bent torsion bar design enhances the angular motion significantly and suppresses unnecessary translational motion. The fabricated 1-DOF micromirror is driven to the maximum optical scan angle of 6.5° at 13 V dc. For a 2-DOF micromirror, optical scan angles of 5.4° and 5.2° are achieved in each direction of rotation at 11 V dc.

Original languageEnglish
Article number045009
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number4
DOIs
Publication statusPublished - 2009 Aug 21

Fingerprint

Torsional stress
Actuators
Photomasks
Silicon
Mirrors
Electric potential
Hot Temperature
Direction compound

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{697337c15c904860b6ee5c96dc7368f9,
title = "Thermally driven torsional micromirrors using pre-bent torsion bar for large static angular displacement",
abstract = "This paper presents one- and two-degree-of-freedom (DOF) torsional micromirrors driven by in-plane thermal actuators for large static angular motion at low operational voltage. The micromirror actuator is fabricated on a silicon-on-insulator (SOI) wafer using three photomasks to form two different thicknesses on the device layer and to define backside holes. The thin layer beam connected to the thick layer torsion bar is pulled by the in-plane thermal actuator, twisting the torsion bar and therefore inducing angular motion of the mirror. The proposed pre-bent torsion bar design enhances the angular motion significantly and suppresses unnecessary translational motion. The fabricated 1-DOF micromirror is driven to the maximum optical scan angle of 6.5° at 13 V dc. For a 2-DOF micromirror, optical scan angles of 5.4° and 5.2° are achieved in each direction of rotation at 11 V dc.",
author = "Youngkee Eun and Jongbaeg Kim",
year = "2009",
month = "8",
day = "21",
doi = "10.1088/0960-1317/19/4/045009",
language = "English",
volume = "19",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "4",

}

Thermally driven torsional micromirrors using pre-bent torsion bar for large static angular displacement. / Eun, Youngkee; Kim, Jongbaeg.

In: Journal of Micromechanics and Microengineering, Vol. 19, No. 4, 045009, 21.08.2009.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Thermally driven torsional micromirrors using pre-bent torsion bar for large static angular displacement

AU - Eun, Youngkee

AU - Kim, Jongbaeg

PY - 2009/8/21

Y1 - 2009/8/21

N2 - This paper presents one- and two-degree-of-freedom (DOF) torsional micromirrors driven by in-plane thermal actuators for large static angular motion at low operational voltage. The micromirror actuator is fabricated on a silicon-on-insulator (SOI) wafer using three photomasks to form two different thicknesses on the device layer and to define backside holes. The thin layer beam connected to the thick layer torsion bar is pulled by the in-plane thermal actuator, twisting the torsion bar and therefore inducing angular motion of the mirror. The proposed pre-bent torsion bar design enhances the angular motion significantly and suppresses unnecessary translational motion. The fabricated 1-DOF micromirror is driven to the maximum optical scan angle of 6.5° at 13 V dc. For a 2-DOF micromirror, optical scan angles of 5.4° and 5.2° are achieved in each direction of rotation at 11 V dc.

AB - This paper presents one- and two-degree-of-freedom (DOF) torsional micromirrors driven by in-plane thermal actuators for large static angular motion at low operational voltage. The micromirror actuator is fabricated on a silicon-on-insulator (SOI) wafer using three photomasks to form two different thicknesses on the device layer and to define backside holes. The thin layer beam connected to the thick layer torsion bar is pulled by the in-plane thermal actuator, twisting the torsion bar and therefore inducing angular motion of the mirror. The proposed pre-bent torsion bar design enhances the angular motion significantly and suppresses unnecessary translational motion. The fabricated 1-DOF micromirror is driven to the maximum optical scan angle of 6.5° at 13 V dc. For a 2-DOF micromirror, optical scan angles of 5.4° and 5.2° are achieved in each direction of rotation at 11 V dc.

UR - http://www.scopus.com/inward/record.url?scp=68849086659&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=68849086659&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/19/4/045009

DO - 10.1088/0960-1317/19/4/045009

M3 - Article

AN - SCOPUS:68849086659

VL - 19

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 4

M1 - 045009

ER -