Thickness dependence on crystalline structure and interfacial reactions in HfO2 films on InP (001) grown by atomic layer deposition

Y. S. Kang, C. Y. Kim, Mann-Ho Cho, K. B. Chung, C. H. An, H. Kim, H. J. Lee, C. S. Kim, T. G. Lee

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

The crystalline structure and interfacial reactions in HfO2 films grown on InP (001) substrates was investigated as a function of film thickness. High resolution transmission electron microscopy and x-ray diffraction measurements were used to investigate changes in the crystalline structure of the HfO2 films. As the thickness of the HfO2 increased, the crystal structure was transformed from monoclinic to tetragonal, and the interfacial layer between the HfO2 film and the InP substrate disappeared. High resolution x-ray photoelectron spectroscopy was also applied to confirm the existence of an interfacial chemical reaction in HfO2 /InP. An interfacial self-cleaning effect occurred during the atomic layer deposition process, resulting in a clear interface with no indication of an interfacial layer between the HfO2 film and the InP surface. Finally, the crystallization process in the HfO2 films was found to be significantly affected by the interfacial energy.

Original languageEnglish
Article number172108
JournalApplied Physics Letters
Volume97
Issue number17
DOIs
Publication statusPublished - 2010 Oct 25

Fingerprint

atomic layer epitaxy
interfacial energy
high resolution
cleaning
x ray spectroscopy
chemical reactions
indication
x ray diffraction
film thickness
photoelectron spectroscopy
crystallization
transmission electron microscopy
crystal structure

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Kang, Y. S. ; Kim, C. Y. ; Cho, Mann-Ho ; Chung, K. B. ; An, C. H. ; Kim, H. ; Lee, H. J. ; Kim, C. S. ; Lee, T. G. / Thickness dependence on crystalline structure and interfacial reactions in HfO2 films on InP (001) grown by atomic layer deposition. In: Applied Physics Letters. 2010 ; Vol. 97, No. 17.
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abstract = "The crystalline structure and interfacial reactions in HfO2 films grown on InP (001) substrates was investigated as a function of film thickness. High resolution transmission electron microscopy and x-ray diffraction measurements were used to investigate changes in the crystalline structure of the HfO2 films. As the thickness of the HfO2 increased, the crystal structure was transformed from monoclinic to tetragonal, and the interfacial layer between the HfO2 film and the InP substrate disappeared. High resolution x-ray photoelectron spectroscopy was also applied to confirm the existence of an interfacial chemical reaction in HfO2 /InP. An interfacial self-cleaning effect occurred during the atomic layer deposition process, resulting in a clear interface with no indication of an interfacial layer between the HfO2 film and the InP surface. Finally, the crystallization process in the HfO2 films was found to be significantly affected by the interfacial energy.",
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Thickness dependence on crystalline structure and interfacial reactions in HfO2 films on InP (001) grown by atomic layer deposition. / Kang, Y. S.; Kim, C. Y.; Cho, Mann-Ho; Chung, K. B.; An, C. H.; Kim, H.; Lee, H. J.; Kim, C. S.; Lee, T. G.

In: Applied Physics Letters, Vol. 97, No. 17, 172108, 25.10.2010.

Research output: Contribution to journalArticle

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AU - An, C. H.

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