Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL

Yong Joong Yoon; Hyun Choi; Wan Chin Kim; Taesun Song; No Cheol Park

doi:10.1007/s00542-006-0353-2

Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL

Yong Joong Yoon, Hyun Choi, Wan Chin Kim, Taesun Song, No Cheol Park

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

In this paper, we propose a novel optics design for improving the thickness tolerance of a super-hemispherical solid immersion lens (SIL) that is usually used in near-field recording for high data density. To obtain the improved thickness tolerance of a SIL and a high numerical aperture simultaneously, an aspheric replicated lens is added on the SIL. Using an additional aspheric replicated lens, spherical aberration which induces the tight thickness tolerance of the SIL is effectively reduced, therefore it was able to improve the thickness tolerance of the SIL, maintaining high NA equal to that of super-hemispherical SIL. In addition, in this paper, other various tolerances such as decenter and tilt are considered to make sure of the possibility of fabrication.

Original language	English
Pages (from-to)	1289-1295
Number of pages	7
Journal	Microsystem Technologies
Volume	13
Issue number	8-10
DOIs	https://doi.org/10.1007/s00542-006-0353-2
Publication status	Published - 2007 May

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

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10.1007/s00542-006-0353-2

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abstract = "In this paper, we propose a novel optics design for improving the thickness tolerance of a super-hemispherical solid immersion lens (SIL) that is usually used in near-field recording for high data density. To obtain the improved thickness tolerance of a SIL and a high numerical aperture simultaneously, an aspheric replicated lens is added on the SIL. Using an additional aspheric replicated lens, spherical aberration which induces the tight thickness tolerance of the SIL is effectively reduced, therefore it was able to improve the thickness tolerance of the SIL, maintaining high NA equal to that of super-hemispherical SIL. In addition, in this paper, other various tolerances such as decenter and tilt are considered to make sure of the possibility of fabrication.",

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AU - Yoon, Yong Joong

AU - Choi, Hyun

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AU - Song, Taesun

AU - Park, No Cheol

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Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL

Abstract

All Science Journal Classification (ASJC) codes

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