Abstract
In this paper, we propose a novel optics design for improving the thickness tolerance of a super-hemispherical solid immersion lens (SIL) that is usually used in near-field recording for high data density. To obtain the improved thickness tolerance of a SIL and a high numerical aperture simultaneously, an aspheric replicated lens is added on the SIL. Using an additional aspheric replicated lens, spherical aberration which induces the tight thickness tolerance of the SIL is effectively reduced, therefore it was able to improve the thickness tolerance of the SIL, maintaining high NA equal to that of super-hemispherical SIL. In addition, in this paper, other various tolerances such as decenter and tilt are considered to make sure of the possibility of fabrication.
| Original language | English |
|---|---|
| Pages (from-to) | 1289-1295 |
| Number of pages | 7 |
| Journal | Microsystem Technologies |
| Volume | 13 |
| Issue number | 8-10 |
| DOIs | |
| Publication status | Published - 2007 May 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering
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Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL. / Yoon, Yong Joong; Choi, Hyun; Kim, Wan Chin; Song, Taesun; Park, No Cheol.
In: Microsystem Technologies, Vol. 13, No. 8-10, 01.05.2007, p. 1289-1295.Research output: Contribution to journal › Article
TY - JOUR
T1 - Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL
AU - Yoon, Yong Joong
AU - Choi, Hyun
AU - Kim, Wan Chin
AU - Song, Taesun
AU - Park, No Cheol
PY - 2007/5/1
Y1 - 2007/5/1
N2 - In this paper, we propose a novel optics design for improving the thickness tolerance of a super-hemispherical solid immersion lens (SIL) that is usually used in near-field recording for high data density. To obtain the improved thickness tolerance of a SIL and a high numerical aperture simultaneously, an aspheric replicated lens is added on the SIL. Using an additional aspheric replicated lens, spherical aberration which induces the tight thickness tolerance of the SIL is effectively reduced, therefore it was able to improve the thickness tolerance of the SIL, maintaining high NA equal to that of super-hemispherical SIL. In addition, in this paper, other various tolerances such as decenter and tilt are considered to make sure of the possibility of fabrication.
AB - In this paper, we propose a novel optics design for improving the thickness tolerance of a super-hemispherical solid immersion lens (SIL) that is usually used in near-field recording for high data density. To obtain the improved thickness tolerance of a SIL and a high numerical aperture simultaneously, an aspheric replicated lens is added on the SIL. Using an additional aspheric replicated lens, spherical aberration which induces the tight thickness tolerance of the SIL is effectively reduced, therefore it was able to improve the thickness tolerance of the SIL, maintaining high NA equal to that of super-hemispherical SIL. In addition, in this paper, other various tolerances such as decenter and tilt are considered to make sure of the possibility of fabrication.
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U2 - 10.1007/s00542-006-0353-2
DO - 10.1007/s00542-006-0353-2
M3 - Article
AN - SCOPUS:34548208133
VL - 13
SP - 1289
EP - 1295
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 8-10
ER -