Threshold voltage control by gate electrode in Ga-Sn-Zn-O thin-film transistors for logic inverter application

Hee Sung Lee, Chan Ho Park, Kwang H. Lee, Dong Ho Kim, Hye Ri Kim, Gun Hwan Lee, Seongil Im

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We report on the fabrication of Ga-Sn-Zn-O thin-film transistors (GTZO-TFTs) and their inverter application. For the most stable and highly-performing GTZO-TFT, an optimal oxygen pressure condition was extracted out during co-sputter deposition of Ga-doped ZnO and SnO2. Using the oxygen pressure condition, we fabricated top-gate GTZO-TFTs for a logic inverter, which has two serially-connected top-gate TFTs with different gate electrodes: conducting NiOx and Al. Since the electrodes have very different work functions controlling the threshold voltages of TFTs, our inverter demonstrated a nice operation at less than 5 V with a high voltage gain of over 25. (

Original languageEnglish
Pages (from-to)211-213
Number of pages3
JournalPhysica Status Solidi - Rapid Research Letters
Volume5
Issue number5-6
DOIs
Publication statusPublished - 2011 Jun 1

Fingerprint

Thin film transistors
Threshold voltage
Voltage control
threshold voltage
logic
transistors
Oxygen
Sputter deposition
Electrodes
electrodes
thin films
oxygen
Fabrication
high voltages
Electric potential
conduction
fabrication

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Lee, Hee Sung ; Park, Chan Ho ; Lee, Kwang H. ; Kim, Dong Ho ; Kim, Hye Ri ; Lee, Gun Hwan ; Im, Seongil. / Threshold voltage control by gate electrode in Ga-Sn-Zn-O thin-film transistors for logic inverter application. In: Physica Status Solidi - Rapid Research Letters. 2011 ; Vol. 5, No. 5-6. pp. 211-213.
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Threshold voltage control by gate electrode in Ga-Sn-Zn-O thin-film transistors for logic inverter application. / Lee, Hee Sung; Park, Chan Ho; Lee, Kwang H.; Kim, Dong Ho; Kim, Hye Ri; Lee, Gun Hwan; Im, Seongil.

In: Physica Status Solidi - Rapid Research Letters, Vol. 5, No. 5-6, 01.06.2011, p. 211-213.

Research output: Contribution to journalArticle

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