In this study, the sensing characteristics of tin oxide-based gas sensors deposit with different amounts of metalloporphyrin, which is a functionalization substance, are evaluated. The mass of metalloporphyrin deposited is 3, 10, 20, 30, and 40 mg for 5 different sensors prepared. The deposition of 3 mg of metalloporphyrin result in an island form of functionalization instead of a thin film; meanwhile, thin films with thicknesses of 25, 35, 74, and 92 nm are formed for the other four cases. As the deposition amount of metalloporphyrin increase, the performance of the sensor deteriorate. The samples are prepared by subdividing the amount of metalloporphyrin source to determine the optimized deposition amount. A sample is prepared with deposition amounts ranging between 1 to 10 mg. The sensors deposit with 3–5 mg metalloporphyrin has excellent response, response, and recovery time characteristics.
|Journal||Micro and Nano Systems Letters|
|Publication status||Published - 2022 Dec|
Bibliographical noteFunding Information:
This work was supported by Korea Environment Industry & Technology Institute(KEITI) through Technology Development Project for Biological Hazards Management in Indoor Air Program(or Project), funded by Korea Ministry of Environment(MOE)(No. 2021003370005).
© 2022, The Author(s).
All Science Journal Classification (ASJC) codes
- Biomedical Engineering