Transparent and photo-stable ZnO thin-film transistors to drive an active matrix organic-light-emitting-diode display panel

Sang Hee K. Park, Chi Sun Hwang, Minki Ryu, Shinhyuk Yang, Chunwon Byun, Jaeheon Shin, Jeong Lk Lee, Kimoon Lee, Min Suk Oh, Seongil Im

Research output: Contribution to journalArticle

297 Citations (Scopus)

Abstract

Photo and electrically stable transparent ZnO Thin Film Transistors (TFT) for an Active Matrix- Organic Light Emitting Diode (AM-OLED) panel was fabricated. The fabrication of a bottom emission AM-OLED back panel with a transparent ZnO-TFT array, 150 NM thick Indium-Tin-Oxide (ITO) glass was used for the substrate. A 20 nm thick ZnO semiconductor film was deposited by means of plasma assisted atomic layer deposition (PEALD), after source/drain patterning of ITO by wet etching. Trimethylaluminium (TMA) was used as an Al precursor in all the ALD experiments. The electrically table ZnO-TTFT showed quite good photo-stability and full transparent ZnO-TFT array demonstrates a successful operation of a 2.5 inch sized bottom emission AM-blue OLED panel. ZnO-TTFT with a water-vapor precursor processed Al2O3 dielectric is very effective as a driver for an efficient AM-OLED display.

Original languageEnglish
Pages (from-to)678-682
Number of pages5
JournalAdvanced Materials
Volume21
Issue number6
DOIs
Publication statusPublished - 2009 Feb 9

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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    Park, S. H. K., Hwang, C. S., Ryu, M., Yang, S., Byun, C., Shin, J., Lee, J. L., Lee, K., Oh, M. S., & Im, S. (2009). Transparent and photo-stable ZnO thin-film transistors to drive an active matrix organic-light-emitting-diode display panel. Advanced Materials, 21(6), 678-682. https://doi.org/10.1002/adma.200801470