Tuning of Thermoelectric Properties of MoSe2 Thin Films Under Helium Ion Irradiation

Hyuk Jin Kim, Nguyen Van Quang, Thi Huong Nguyen, Sera Kim, Yangjin Lee, In Hak Lee, Sunglae Cho, Maeng Je Seong, Kwanpyo Kim, Young Jun Chang

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1 Citation (Scopus)


Transition metal dichalcogenides have attracted renewed interest for use as thermoelectric materials owing to their tunable bandgap, moderate Seebeck coefficient, and low thermal conductivity. However, their thermoelectric parameters such as Seebeck coefficient, electrical conductivity, and thermal conductivity are interdependent, which is a drawback. Therefore, it is necessary to find a way to adjust one of these parameters without affecting the other parameters. In this study, we investigated the effect of helium ion irradiation on MoSe2 thin films with the objective of controlling the Seebeck coefficient and electrical conductivity. At the optimal irradiation dose of 1015 cm−2, we observed multiple enhancements of the power factor resulting from an increase in the electrical conductivity, with slight suppression of the Seebeck coefficient. Raman spectroscopy, X-ray diffraction, and transmission electron microscopy analyses revealed that irradiation-induced selenium vacancies played an important role in changing the thermoelectric properties of MoSe2 thin films. These results suggest that helium ion irradiation is a promising method to significantly improve the thermoelectric properties of two-dimensional transition metal dichalcogenides. Graphical Abstract: [Figure not available: see fulltext.]Effect of He+ irradiation on thermoelectric properties of MoSe2 thin films.

Original languageEnglish
Article number26
JournalNanoscale Research Letters
Issue number1
Publication statusPublished - 2022

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation (NRF) grants funded by the Korean government (Nos. NRF-2020R1A2C200373211, 2020R1A5A1016518, 2020K1A4A7A02095438). Part of this study has been performed using facilities at IBS Center for Correlated Electron Systems, Seoul National University. This research was supported by Nano⋅Material Technology Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and Future Planning, Korea (2009-0082580).

Publisher Copyright:
© 2022, The Author(s).

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics


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