Tuning the spring constant of cantilever-free tip arrays

Daniel J. Eichelsdoerfer, Keith A. Brown, Radha Boya, Wooyoung Shim, Chad A. Mirkin

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.

Original languageEnglish
Pages (from-to)664-667
Number of pages4
JournalNano letters
Volume13
Issue number2
DOIs
Publication statusPublished - 2013 Feb 13

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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  • Cite this

    Eichelsdoerfer, D. J., Brown, K. A., Boya, R., Shim, W., & Mirkin, C. A. (2013). Tuning the spring constant of cantilever-free tip arrays. Nano letters, 13(2), 664-667. https://doi.org/10.1021/nl304268u