Abstract
A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.
| Original language | English |
|---|---|
| Pages (from-to) | 664-667 |
| Number of pages | 4 |
| Journal | Nano letters |
| Volume | 13 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2013 Feb 13 |
All Science Journal Classification (ASJC) codes
- Bioengineering
- Chemistry(all)
- Materials Science(all)
- Condensed Matter Physics
- Mechanical Engineering
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Cite this
Eichelsdoerfer, D. J., Brown, K. A., Boya, R., Shim, W., & Mirkin, C. A. (2013). Tuning the spring constant of cantilever-free tip arrays. Nano letters, 13(2), 664-667. https://doi.org/10.1021/nl304268u