Tuning the spring constant of cantilever-free tip arrays

Daniel J. Eichelsdoerfer; Keith A. Brown; Radha Boya; Wooyoung Shim; Chad A. Mirkin

doi:10.1021/nl304268u

Tuning the spring constant of cantilever-free tip arrays

Daniel J. Eichelsdoerfer, Keith A. Brown, Radha Boya, Wooyoung Shim, Chad A. Mirkin

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.

Original language	English
Pages (from-to)	664-667
Number of pages	4
Journal	Nano letters
Volume	13
Issue number	2
DOIs	https://doi.org/10.1021/nl304268u
Publication status	Published - 2013 Feb 13

All Science Journal Classification (ASJC) codes

Bioengineering
Chemistry(all)
Materials Science(all)
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl304268u

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