Tuning the spring constant of cantilever-free tip arrays

Daniel J. Eichelsdoerfer, Keith A. Brown, Radha Boya, Wooyoung Shim, Chad A. Mirkin

Research output: Contribution to journal › Article

15 Citations (Scopus)

Abstract

A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.

Original languageEnglish
Pages (from-to)664-667
Number of pages4
JournalNano letters
Volume13
Issue number2
DOIs
Publication statusPublished - 2013 Feb 13

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Silicon
Silicon nitride
Tuning
tuning
Mechanical properties
Substrates
silicon nitrides
adjusting
mechanical properties
silicon
elastomeric
silicon nitride

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

Cite this

Eichelsdoerfer, D. J., Brown, K. A., Boya, R., Shim, W., & Mirkin, C. A. (2013). Tuning the spring constant of cantilever-free tip arrays. Nano letters, 13(2), 664-667. https://doi.org/10.1021/nl304268u
Eichelsdoerfer, Daniel J. ; Brown, Keith A. ; Boya, Radha ; Shim, Wooyoung ; Mirkin, Chad A. / Tuning the spring constant of cantilever-free tip arrays. In: Nano letters. 2013 ; Vol. 13, No. 2. pp. 664-667.
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Eichelsdoerfer, DJ, Brown, KA, Boya, R, Shim, W & Mirkin, CA 2013, 'Tuning the spring constant of cantilever-free tip arrays', Nano letters, vol. 13, no. 2, pp. 664-667. https://doi.org/10.1021/nl304268u

Tuning the spring constant of cantilever-free tip arrays. / Eichelsdoerfer, Daniel J.; Brown, Keith A.; Boya, Radha; Shim, Wooyoung; Mirkin, Chad A.

In: Nano letters, Vol. 13, No. 2, 13.02.2013, p. 664-667.

Research output: Contribution to journal › Article

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Eichelsdoerfer DJ, Brown KA, Boya R, Shim W, Mirkin CA. Tuning the spring constant of cantilever-free tip arrays. Nano letters. 2013 Feb 13;13(2):664-667. https://doi.org/10.1021/nl304268u

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