Two-dimensional photonic crystal color filter development

Eun Hyoung Cho, Hae Sung Kim, Byoung Ho Cheong, Prudnikov Oleg, Wenxu Xianyua, Jin Seung Sohn, Ma Dong-Joon, Hwan Young Choi, No Cheol Park, Young Pil Park

Research output: Contribution to journalArticle

74 Citations (Scopus)

Abstract

Reflective color filters using two-dimensional photonic crystals based on sub-wavelength gratings were proposed and constructed. Using low-cost nanoimprint lithography, an amorphous silicon layer was deposited through the low-temperature PECVD process and patterned into two- dimensional structures. The isolated amorphous silicon patterns were readily crystallized using a multi-shot excimer laser annealing at low energy. A study of the close relationship between color filter reflectance and silicon pattern crystallinity is introduced. Theoretical and experimental results show that the proposed color filters have high reflectance and, moreover, decrease the dependence on incident angle compared to one-dimensional photonic crystal color filters.

Original languageEnglish
Pages (from-to)8621-8629
Number of pages9
JournalOptics Express
Volume17
Issue number10
DOIs
Publication statusPublished - 2009 May 11

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Fingerprint Dive into the research topics of 'Two-dimensional photonic crystal color filter development'. Together they form a unique fingerprint.

  • Cite this

    Cho, E. H., Kim, H. S., Cheong, B. H., Oleg, P., Xianyua, W., Sohn, J. S., Dong-Joon, M., Choi, H. Y., Park, N. C., & Park, Y. P. (2009). Two-dimensional photonic crystal color filter development. Optics Express, 17(10), 8621-8629. https://doi.org/10.1364/OE.17.008621