Twyman-Green interferometer using virtual optics for eliminating reference wave

Cheol Ki Min, Sungbin Jeon, Hyungbae Moon, Kyoung Su Park, No Cheol Park, Hyunseok Yang, Young Pil Park

Research output: Contribution to journalArticle

Abstract

The Twyman-Green (TG) interferometer is widely used to evaluate optical imaging systems. It consists of an object wave and a reference wave for creating an interferogram. In this paper, we propose a simple interferometer that eliminates the actual reference wave. Instead of the piezoelectric trasnducer mirror used in the reference wave, a virtual optics was used via a numerical simulation of plane-wave illumination. A solid immersion lens of NA = 1.84 is described and fabricated for evaluating an interferogram. To verify the proposed method, the resulting interferogram with the aberration analysis was compared with those obtained using a conventional TG interferometer. The total wavefront aberration value was measured about 21 mλRMS and the difference between the conventional and proposed methods was approximately 3 %. Phase-shifting interferometry without mechanical and optical disturbances was demonstrated.

Original languageEnglish
Pages (from-to)1505-1511
Number of pages7
JournalMicrosystem Technologies
Volume19
Issue number9-10
DOIs
Publication statusPublished - 2013 Sep 1

Fingerprint

Interferometers
Optics
interferometry
interferometers
optics
aberration
Aberrations
submerging
Wavefronts
plane waves
disturbances
Interferometry
Imaging systems
illumination
lenses
mirrors
Lenses
Mirrors
Lighting
Computer simulation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Min, Cheol Ki ; Jeon, Sungbin ; Moon, Hyungbae ; Park, Kyoung Su ; Park, No Cheol ; Yang, Hyunseok ; Park, Young Pil. / Twyman-Green interferometer using virtual optics for eliminating reference wave. In: Microsystem Technologies. 2013 ; Vol. 19, No. 9-10. pp. 1505-1511.
@article{3bc75c75c7f64209af6d1b7230261e1e,
title = "Twyman-Green interferometer using virtual optics for eliminating reference wave",
abstract = "The Twyman-Green (TG) interferometer is widely used to evaluate optical imaging systems. It consists of an object wave and a reference wave for creating an interferogram. In this paper, we propose a simple interferometer that eliminates the actual reference wave. Instead of the piezoelectric trasnducer mirror used in the reference wave, a virtual optics was used via a numerical simulation of plane-wave illumination. A solid immersion lens of NA = 1.84 is described and fabricated for evaluating an interferogram. To verify the proposed method, the resulting interferogram with the aberration analysis was compared with those obtained using a conventional TG interferometer. The total wavefront aberration value was measured about 21 mλRMS and the difference between the conventional and proposed methods was approximately 3 {\%}. Phase-shifting interferometry without mechanical and optical disturbances was demonstrated.",
author = "Min, {Cheol Ki} and Sungbin Jeon and Hyungbae Moon and Park, {Kyoung Su} and Park, {No Cheol} and Hyunseok Yang and Park, {Young Pil}",
year = "2013",
month = "9",
day = "1",
doi = "10.1007/s00542-013-1845-5",
language = "English",
volume = "19",
pages = "1505--1511",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer Verlag",
number = "9-10",

}

Twyman-Green interferometer using virtual optics for eliminating reference wave. / Min, Cheol Ki; Jeon, Sungbin; Moon, Hyungbae; Park, Kyoung Su; Park, No Cheol; Yang, Hyunseok; Park, Young Pil.

In: Microsystem Technologies, Vol. 19, No. 9-10, 01.09.2013, p. 1505-1511.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Twyman-Green interferometer using virtual optics for eliminating reference wave

AU - Min, Cheol Ki

AU - Jeon, Sungbin

AU - Moon, Hyungbae

AU - Park, Kyoung Su

AU - Park, No Cheol

AU - Yang, Hyunseok

AU - Park, Young Pil

PY - 2013/9/1

Y1 - 2013/9/1

N2 - The Twyman-Green (TG) interferometer is widely used to evaluate optical imaging systems. It consists of an object wave and a reference wave for creating an interferogram. In this paper, we propose a simple interferometer that eliminates the actual reference wave. Instead of the piezoelectric trasnducer mirror used in the reference wave, a virtual optics was used via a numerical simulation of plane-wave illumination. A solid immersion lens of NA = 1.84 is described and fabricated for evaluating an interferogram. To verify the proposed method, the resulting interferogram with the aberration analysis was compared with those obtained using a conventional TG interferometer. The total wavefront aberration value was measured about 21 mλRMS and the difference between the conventional and proposed methods was approximately 3 %. Phase-shifting interferometry without mechanical and optical disturbances was demonstrated.

AB - The Twyman-Green (TG) interferometer is widely used to evaluate optical imaging systems. It consists of an object wave and a reference wave for creating an interferogram. In this paper, we propose a simple interferometer that eliminates the actual reference wave. Instead of the piezoelectric trasnducer mirror used in the reference wave, a virtual optics was used via a numerical simulation of plane-wave illumination. A solid immersion lens of NA = 1.84 is described and fabricated for evaluating an interferogram. To verify the proposed method, the resulting interferogram with the aberration analysis was compared with those obtained using a conventional TG interferometer. The total wavefront aberration value was measured about 21 mλRMS and the difference between the conventional and proposed methods was approximately 3 %. Phase-shifting interferometry without mechanical and optical disturbances was demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=84883462278&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883462278&partnerID=8YFLogxK

U2 - 10.1007/s00542-013-1845-5

DO - 10.1007/s00542-013-1845-5

M3 - Article

AN - SCOPUS:84883462278

VL - 19

SP - 1505

EP - 1511

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 9-10

ER -