The Twyman-Green (TG) interferometer is widely used to evaluate optical imaging systems. It consists of an object wave and a reference wave for creating an interferogram. In this paper, we propose a simple interferometer that eliminates the actual reference wave. Instead of the piezoelectric trasnducer mirror used in the reference wave, a virtual optics was used via a numerical simulation of plane-wave illumination. A solid immersion lens of NA = 1.84 is described and fabricated for evaluating an interferogram. To verify the proposed method, the resulting interferogram with the aberration analysis was compared with those obtained using a conventional TG interferometer. The total wavefront aberration value was measured about 21 mλRMS and the difference between the conventional and proposed methods was approximately 3 %. Phase-shifting interferometry without mechanical and optical disturbances was demonstrated.
Bibliographical noteFunding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2013-027254).
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering