Ultra low sheet resistance on poly silicon film by excimer laser activation

Huck Lim, Huaxing Yin, Wenxu Xianyu, Jang Yeon Kwon, Xiaoxin Zhang, Hans S. Cho, Jong Man Kim, Kyung Bae Park, Do Young Kim, Ji Sim Jung, Takashi Noguchi, Takashi Noguchi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

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Physics & Astronomy