Ultrafine particle counter using a MEMS-based particle processing chip

Hong Lae Kim, Jang Seop Han, Sang Myun Lee, Hong Bum Kwon, Jungho Hwang, Yong Jun Kim

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.

Original languageEnglish
Article number7051016
Pages (from-to)559-562
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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