Monitoring the body temperature with high accuracy provides a fast, facile, yet powerful route about the human body in a wide range of health information standards. Here, the first ever ultrasensitive and stretchable gold-doped silicon nanomembrane (Au-doped SiNM) epidermal temperature sensor array is introduced. The ultrasensitivity is achieved by shifting freeze-out region to intrinsic region in carrier density and modulation of fermi energy level of p-type SiNM through the development of a novel gold-doping strategy. The Au-doped SiNM is readily transferred onto an ultrathin polymer layer with a well-designed serpentine mesh structure, capable of being utilized as an epidermal temperature sensor array. Measurements in vivo and in vitro show temperature coefficient of resistance as high as −37270.72 ppm °C−1, 22 times higher than existing metal-based temperature sensors with similar structures, and one of the highest thermal sensitivity among the inorganic material based temperature sensors. Applications in the continuous monitoring of body temperature and respiration rate during exercising are demonstrated with a successful capture of information. This work lays a foundation for monitoring body temperature, potentially useful for precision diagnosis (e.g., continuous monitoring body temperature in coronavirus disease 2019 cases) and management of disease relevance to body temperature in healthcare.
|Publication status||Published - 2022 Jan 27|
Bibliographical noteFunding Information:
M.S., K.K., and Y.Z. contributed equally to this work. K.J.Y. acknowledges the support received from the National Research Foundation of Korea (NRF‐2018M3A7B4071109, NRF‐2019R1A2C2086085 and NRF‐2021R1A4A1031437). J.W.L. and T.L. acknowledge the support received from the National Research Foundation of Korea (NRF) funded by Ministry of Science and ICT (NRF‐2017M3A7B4049466). T.L. acknowledges the support received from the National Research Foundation of Korea (NRF‐2019R1A6A1A11055660), KIST Institutional Program (Project No. 2Z06430‐20‐P064), R&D program of MOTIE/KEIT (20012460), and Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT) (Project No. KMDF_PR_20200901_0093, 9991006766). J.W.L. acknowledges the support received from the National Research Foundation of Korea (NRF) funded by Ministry of Science (NRF‐2020R1C1C1013900). W.‐H.Y. acknowledges the support received from the IEN Center Grant (Center for Human‐Centric Interfaces and Engineering) from the Georgia Tech Institute for Electronics and Nanotechnology. Seowoo Choi, Kyunam Kim, Seongkyu Cho, and Jiwoo Yu made contributions in the early stage of developing the processing conditions of gold‐doped silicon.
© 2021 The Authors. Advanced Materials published by Wiley-VCH GmbH
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering