Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems

Hui Fang, Jianing Zhao, Ki Jun Yu, Enming Song, Amir Barati Farimani, Chia Han Chiang, Xin Jin, Yeguang Xue, Dong Xu, Wenbo Du, Kyung Jin Seo, Yiding Zhong, Zijian Yang, Sang Min Won, Guanhua Fang, Seo Woo Choi, Santanu Chaudhuri, Yonggang Huang, Muhammad Ashraful Alam, Jonathan Viventi & 2 others N. R. Aluru, John A. Rogers

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

Materials that can serve as long-lived barriers to biofluids are essential to the development of any type of chronic electronic implant. Devices such as cardiac pacemakers and cochlear implants use bulk metal or ceramic packages as hermetic enclosures for the electronics. Emerging classes of flexible, biointegrated electronic systems demand similar levels of isolation from biofluids but with thin, compliant films that can simultaneously serve as biointerfaces for sensing and/or actuation while in contact with the soft, curved, and moving surfaces of target organs. This paper introduces a solution to this materials challenge that combines (i) ultrathin, pristine layers of silicon dioxide (SiO 2 ) thermally grown on device-grade silicon wafers, and (ii) processing schemes that allow integration of these materials onto flexible electronic platforms. Accelerated lifetime tests suggest robust barrier characteristics on timescales that approach 70 y, in layers that are sufficiently thin (less than 1 μm) to avoid significant compromises in mechanical flexibility or in electrical interface fidelity. Detailed studies of temperature- and thickness-dependent electrical and physical properties reveal the key characteristics. Molecular simulations highlight essential aspects of the chemistry that governs interactions between the SiO 2 and surrounding water. Examples of use with passive and active components in high-performance flexible electronic devices suggest broad utility in advanced chronic implants.

Original languageEnglish
Pages (from-to)11682-11687
Number of pages6
JournalProceedings of the National Academy of Sciences of the United States of America
Volume113
Issue number42
DOIs
Publication statusPublished - 2016 Oct 18

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Silicon Dioxide
Equipment and Supplies
Cochlear Implants
Ceramics
Silicon
Metals
Temperature
Water
Hermetic

All Science Journal Classification (ASJC) codes

  • General

Cite this

Fang, Hui ; Zhao, Jianing ; Yu, Ki Jun ; Song, Enming ; Farimani, Amir Barati ; Chiang, Chia Han ; Jin, Xin ; Xue, Yeguang ; Xu, Dong ; Du, Wenbo ; Seo, Kyung Jin ; Zhong, Yiding ; Yang, Zijian ; Won, Sang Min ; Fang, Guanhua ; Choi, Seo Woo ; Chaudhuri, Santanu ; Huang, Yonggang ; Alam, Muhammad Ashraful ; Viventi, Jonathan ; Aluru, N. R. ; Rogers, John A. / Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems. In: Proceedings of the National Academy of Sciences of the United States of America. 2016 ; Vol. 113, No. 42. pp. 11682-11687.
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abstract = "Materials that can serve as long-lived barriers to biofluids are essential to the development of any type of chronic electronic implant. Devices such as cardiac pacemakers and cochlear implants use bulk metal or ceramic packages as hermetic enclosures for the electronics. Emerging classes of flexible, biointegrated electronic systems demand similar levels of isolation from biofluids but with thin, compliant films that can simultaneously serve as biointerfaces for sensing and/or actuation while in contact with the soft, curved, and moving surfaces of target organs. This paper introduces a solution to this materials challenge that combines (i) ultrathin, pristine layers of silicon dioxide (SiO 2 ) thermally grown on device-grade silicon wafers, and (ii) processing schemes that allow integration of these materials onto flexible electronic platforms. Accelerated lifetime tests suggest robust barrier characteristics on timescales that approach 70 y, in layers that are sufficiently thin (less than 1 μm) to avoid significant compromises in mechanical flexibility or in electrical interface fidelity. Detailed studies of temperature- and thickness-dependent electrical and physical properties reveal the key characteristics. Molecular simulations highlight essential aspects of the chemistry that governs interactions between the SiO 2 and surrounding water. Examples of use with passive and active components in high-performance flexible electronic devices suggest broad utility in advanced chronic implants.",
author = "Hui Fang and Jianing Zhao and Yu, {Ki Jun} and Enming Song and Farimani, {Amir Barati} and Chiang, {Chia Han} and Xin Jin and Yeguang Xue and Dong Xu and Wenbo Du and Seo, {Kyung Jin} and Yiding Zhong and Zijian Yang and Won, {Sang Min} and Guanhua Fang and Choi, {Seo Woo} and Santanu Chaudhuri and Yonggang Huang and Alam, {Muhammad Ashraful} and Jonathan Viventi and Aluru, {N. R.} and Rogers, {John A.}",
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Fang, H, Zhao, J, Yu, KJ, Song, E, Farimani, AB, Chiang, CH, Jin, X, Xue, Y, Xu, D, Du, W, Seo, KJ, Zhong, Y, Yang, Z, Won, SM, Fang, G, Choi, SW, Chaudhuri, S, Huang, Y, Alam, MA, Viventi, J, Aluru, NR & Rogers, JA 2016, 'Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems', Proceedings of the National Academy of Sciences of the United States of America, vol. 113, no. 42, pp. 11682-11687. https://doi.org/10.1073/pnas.1605269113

Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems. / Fang, Hui; Zhao, Jianing; Yu, Ki Jun; Song, Enming; Farimani, Amir Barati; Chiang, Chia Han; Jin, Xin; Xue, Yeguang; Xu, Dong; Du, Wenbo; Seo, Kyung Jin; Zhong, Yiding; Yang, Zijian; Won, Sang Min; Fang, Guanhua; Choi, Seo Woo; Chaudhuri, Santanu; Huang, Yonggang; Alam, Muhammad Ashraful; Viventi, Jonathan; Aluru, N. R.; Rogers, John A.

In: Proceedings of the National Academy of Sciences of the United States of America, Vol. 113, No. 42, 18.10.2016, p. 11682-11687.

Research output: Contribution to journalArticle

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T1 - Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems

AU - Fang, Hui

AU - Zhao, Jianing

AU - Yu, Ki Jun

AU - Song, Enming

AU - Farimani, Amir Barati

AU - Chiang, Chia Han

AU - Jin, Xin

AU - Xue, Yeguang

AU - Xu, Dong

AU - Du, Wenbo

AU - Seo, Kyung Jin

AU - Zhong, Yiding

AU - Yang, Zijian

AU - Won, Sang Min

AU - Fang, Guanhua

AU - Choi, Seo Woo

AU - Chaudhuri, Santanu

AU - Huang, Yonggang

AU - Alam, Muhammad Ashraful

AU - Viventi, Jonathan

AU - Aluru, N. R.

AU - Rogers, John A.

PY - 2016/10/18

Y1 - 2016/10/18

N2 - Materials that can serve as long-lived barriers to biofluids are essential to the development of any type of chronic electronic implant. Devices such as cardiac pacemakers and cochlear implants use bulk metal or ceramic packages as hermetic enclosures for the electronics. Emerging classes of flexible, biointegrated electronic systems demand similar levels of isolation from biofluids but with thin, compliant films that can simultaneously serve as biointerfaces for sensing and/or actuation while in contact with the soft, curved, and moving surfaces of target organs. This paper introduces a solution to this materials challenge that combines (i) ultrathin, pristine layers of silicon dioxide (SiO 2 ) thermally grown on device-grade silicon wafers, and (ii) processing schemes that allow integration of these materials onto flexible electronic platforms. Accelerated lifetime tests suggest robust barrier characteristics on timescales that approach 70 y, in layers that are sufficiently thin (less than 1 μm) to avoid significant compromises in mechanical flexibility or in electrical interface fidelity. Detailed studies of temperature- and thickness-dependent electrical and physical properties reveal the key characteristics. Molecular simulations highlight essential aspects of the chemistry that governs interactions between the SiO 2 and surrounding water. Examples of use with passive and active components in high-performance flexible electronic devices suggest broad utility in advanced chronic implants.

AB - Materials that can serve as long-lived barriers to biofluids are essential to the development of any type of chronic electronic implant. Devices such as cardiac pacemakers and cochlear implants use bulk metal or ceramic packages as hermetic enclosures for the electronics. Emerging classes of flexible, biointegrated electronic systems demand similar levels of isolation from biofluids but with thin, compliant films that can simultaneously serve as biointerfaces for sensing and/or actuation while in contact with the soft, curved, and moving surfaces of target organs. This paper introduces a solution to this materials challenge that combines (i) ultrathin, pristine layers of silicon dioxide (SiO 2 ) thermally grown on device-grade silicon wafers, and (ii) processing schemes that allow integration of these materials onto flexible electronic platforms. Accelerated lifetime tests suggest robust barrier characteristics on timescales that approach 70 y, in layers that are sufficiently thin (less than 1 μm) to avoid significant compromises in mechanical flexibility or in electrical interface fidelity. Detailed studies of temperature- and thickness-dependent electrical and physical properties reveal the key characteristics. Molecular simulations highlight essential aspects of the chemistry that governs interactions between the SiO 2 and surrounding water. Examples of use with passive and active components in high-performance flexible electronic devices suggest broad utility in advanced chronic implants.

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U2 - 10.1073/pnas.1605269113

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M3 - Article

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JF - Proceedings of the National Academy of Sciences of the United States of America

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