Uncertainty analysis on optical testing with a Shack-Hartmann sensor and a point source

Dong Won Kang, Jin Seok Lee, Ho Soon Yang, Jae Won Hahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, we analyze the uncertainty in an optical testing system using a Shack-Hartmann sensor for a wavefront measurement device. The main uncertainty sources of the optical testing system are the electrical noise of the ShackHartmann sensor and the wavefront deformation due to the image relay optics and the pinhole source. Using a homemade high-precision plane-wave source as a reference, we calibrate the optics of the system and the ShackHartmann sensor itself. It is found that that the error due to the image relay optics installed between the test lens and the Shack-Hartmann sensor is 0.030 λ (RMS). By warming up the Shack-Hartmann sensor for about 1 hour, the measurement values are stabilized to within 0.001 λ (RMS). After calibrating the optical testing system with the reference source, overall uncertainty in the optical testing system is reduced to 0.009 λ (RMS). Performance of the optical testing system is evaluated by measuring the wavefront errors of various optical components, such as a numerical aperture (NA) 0.25 aspheric lens and a digital video disc (DVD) pick up lens.

Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
DOIs
Publication statusPublished - 2008
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII - San Jose, CA, United States
Duration: 2008 Jan 212008 Jan 22

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6884
ISSN (Print)0277-786X

Other

OtherReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
CountryUnited States
CitySan Jose, CA
Period08/1/2108/1/22

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Uncertainty analysis on optical testing with a Shack-Hartmann sensor and a point source'. Together they form a unique fingerprint.

  • Cite this

    Kang, D. W., Lee, J. S., Yang, H. S., & Hahn, J. W. (2008). Uncertainty analysis on optical testing with a Shack-Hartmann sensor and a point source. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII [68840U] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6884). https://doi.org/10.1117/12.762505