Uniform and simultaneous fabrication of high-precision and high-density density orifice, channel, and reservoirs for inkjet printheads

Jun Bo Yoon, Jae Duk Lee, Chul Hi Han, Euisik Yoon, Choong Ki Kim

Research output: Contribution to journalConference article

1 Citation (Scopus)


We have fabricated a unified Orifice Plate Assembly (OPA) for high-resolution inkjet printheads, which has orifices, ink flow channels, and reservoirs three-dimensionally in a single body, using single-step 3D photolithography followed by single-step electroplating. These three components are the core in inkjet printheads because they determine almost all of ink fluidics, especially the size and trajectory of an ink drop. Therefore, for high-resolution beyond 600dpi, a unified and high-precision orifice plate assembly is strongly needed.

Original languageEnglish
Pages (from-to)214-224
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1998 Dec 1
EventMicromachining and Microfabrication Process Technology IV - Santa Clara, CA, United States
Duration: 1998 Sep 211998 Sep 22


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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