Abstract
Displacement sensing is a fundamental process in mechanical sensors such as force sensors, pressure sensors, accelerometers, and gyroscopes. Advanced techniques utilizing nanomaterials have attracted considerable attention in the drive to enhance the process. In this paper, we propose a novel and highly sensitive device for detecting small displacements. The device utilizes the changes in contact resistance between two sets of vertically aligned carbon nanotube (CNT) arrays, the growth of which was confined to enable their facile and reliable integration with fully fabricated microstructures. Using the displacement transduction of the proposed device, we successfully demonstrated a 3-Axis wide bandwidth accelerometer, which was experimentally confirmed to be highly sensitive compared to conventional piezoresistive sensors. Through a test involving 1.2 million cycles of displacement transductions, the contact resistance of the CNT arrays was proved to be excellently stable, which was a consequence of the high electrical stability and mechanical durability of the CNTs.
| Original language | English |
|---|---|
| Pages (from-to) | 10181-10187 |
| Number of pages | 7 |
| Journal | ACS Applied Materials and Interfaces |
| Volume | 6 |
| Issue number | 13 |
| DOIs | |
| Publication status | Published - 2014 Jul 9 |
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All Science Journal Classification (ASJC) codes
- Materials Science(all)
Cite this
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Using confined self-Adjusting carbon nanotube arrays as high-sensitivity displacement sensing element. / Lee, Jae Ik; Eun, Youngkee; Choi, Jungwook; Kwon, Dae Sung; Kim, Jongbaeg.
In: ACS Applied Materials and Interfaces, Vol. 6, No. 13, 09.07.2014, p. 10181-10187.Research output: Contribution to journal › Article
TY - JOUR
T1 - Using confined self-Adjusting carbon nanotube arrays as high-sensitivity displacement sensing element
AU - Lee, Jae Ik
AU - Eun, Youngkee
AU - Choi, Jungwook
AU - Kwon, Dae Sung
AU - Kim, Jongbaeg
PY - 2014/7/9
Y1 - 2014/7/9
N2 - Displacement sensing is a fundamental process in mechanical sensors such as force sensors, pressure sensors, accelerometers, and gyroscopes. Advanced techniques utilizing nanomaterials have attracted considerable attention in the drive to enhance the process. In this paper, we propose a novel and highly sensitive device for detecting small displacements. The device utilizes the changes in contact resistance between two sets of vertically aligned carbon nanotube (CNT) arrays, the growth of which was confined to enable their facile and reliable integration with fully fabricated microstructures. Using the displacement transduction of the proposed device, we successfully demonstrated a 3-Axis wide bandwidth accelerometer, which was experimentally confirmed to be highly sensitive compared to conventional piezoresistive sensors. Through a test involving 1.2 million cycles of displacement transductions, the contact resistance of the CNT arrays was proved to be excellently stable, which was a consequence of the high electrical stability and mechanical durability of the CNTs.
AB - Displacement sensing is a fundamental process in mechanical sensors such as force sensors, pressure sensors, accelerometers, and gyroscopes. Advanced techniques utilizing nanomaterials have attracted considerable attention in the drive to enhance the process. In this paper, we propose a novel and highly sensitive device for detecting small displacements. The device utilizes the changes in contact resistance between two sets of vertically aligned carbon nanotube (CNT) arrays, the growth of which was confined to enable their facile and reliable integration with fully fabricated microstructures. Using the displacement transduction of the proposed device, we successfully demonstrated a 3-Axis wide bandwidth accelerometer, which was experimentally confirmed to be highly sensitive compared to conventional piezoresistive sensors. Through a test involving 1.2 million cycles of displacement transductions, the contact resistance of the CNT arrays was proved to be excellently stable, which was a consequence of the high electrical stability and mechanical durability of the CNTs.
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U2 - 10.1021/am5015138
DO - 10.1021/am5015138
M3 - Article
AN - SCOPUS:84904103501
VL - 6
SP - 10181
EP - 10187
JO - ACS applied materials & interfaces
JF - ACS applied materials & interfaces
SN - 1944-8244
IS - 13
ER -