Using fiber-optic probes for photoluminescence and evaluation of an InGaN/GaN epi-wafer

Woohyun Jung, Jongki Kim, Hang Eun Joe, Byung Kwon Min, Kyunghwan Oh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Photoluminescence is one of the methods used for analyzing the optical characteristics of materials. For components in solid-state lighting such as GaN-based LEDs, the use of an LED structure configuration on a patterned sapphire substrate has shown to be highly effective in improving light-extraction efficiency. We proposed a compact and simple photoluminescence measurement system based on fiber-optic probes that can be scanned over a 20 × 20 μm2 area with a high spatial resolution. We applied the system in morphological study of InGaN/GaN epitaxial layers for LED applications. With this system, we obtained peak intensity, peak wavelength, and full width at half maximum of the emission spectrum.

Original languageEnglish
Title of host publicationDimensional Optical Metrology and Inspection for Practical Applications II
DOIs
Publication statusPublished - 2013 Nov 28
Event2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications - San Diego, CA, United States
Duration: 2013 Aug 252013 Aug 26

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8839
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications
CountryUnited States
CitySan Diego, CA
Period13/8/2513/8/26

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Jung, W., Kim, J., Joe, H. E., Min, B. K., & Oh, K. (2013). Using fiber-optic probes for photoluminescence and evaluation of an InGaN/GaN epi-wafer. In Dimensional Optical Metrology and Inspection for Practical Applications II [88390C] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8839). https://doi.org/10.1117/12.2024634