Vacuum-assisted microfluidic lithography of ceramic microstructures

Sung Jin Ahn, Jooho Moon

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)


The method to fabricate complex shaped micro-patterned ceramic structures has been developed. Vacuum-assisted infiltrating the suspensions to the micro channels generated by the contact of polydimethylsiloxane mold to the substrate enables simple micro patterning of ceramics with complex structures in a relatively large area in short time. The use of well-dispersed ethanol-based suspensions of solid loading ∼20 vol% plays an important role in a successful pattern formation without defects. The current process, called microfluidic lithography, is applicable to the entire range of ceramic materials which can be processed to colloidal suspension with relatively low viscosity. It is demonstrated that the interdigitated ceramic structures with 50 μm in the width composed of Al 2O 3 and MO on a Si substrate were fabricated in an area of 5 mm × 5 mm.

Original languageEnglish
Pages (from-to)1171-1174
Number of pages4
JournalJournal of the American Ceramic Society
Issue number5
Publication statusPublished - 2005 May

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry


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