TY - JOUR
T1 - Vacuum-assisted microfluidic lithography of ceramic microstructures
AU - Ahn, Sung Jin
AU - Moon, Jooho
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2005/5
Y1 - 2005/5
N2 - The method to fabricate complex shaped micro-patterned ceramic structures has been developed. Vacuum-assisted infiltrating the suspensions to the micro channels generated by the contact of polydimethylsiloxane mold to the substrate enables simple micro patterning of ceramics with complex structures in a relatively large area in short time. The use of well-dispersed ethanol-based suspensions of solid loading ∼20 vol% plays an important role in a successful pattern formation without defects. The current process, called microfluidic lithography, is applicable to the entire range of ceramic materials which can be processed to colloidal suspension with relatively low viscosity. It is demonstrated that the interdigitated ceramic structures with 50 μm in the width composed of Al 2O 3 and MO on a Si substrate were fabricated in an area of 5 mm × 5 mm.
AB - The method to fabricate complex shaped micro-patterned ceramic structures has been developed. Vacuum-assisted infiltrating the suspensions to the micro channels generated by the contact of polydimethylsiloxane mold to the substrate enables simple micro patterning of ceramics with complex structures in a relatively large area in short time. The use of well-dispersed ethanol-based suspensions of solid loading ∼20 vol% plays an important role in a successful pattern formation without defects. The current process, called microfluidic lithography, is applicable to the entire range of ceramic materials which can be processed to colloidal suspension with relatively low viscosity. It is demonstrated that the interdigitated ceramic structures with 50 μm in the width composed of Al 2O 3 and MO on a Si substrate were fabricated in an area of 5 mm × 5 mm.
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U2 - 10.1111/j.1551-2916.2005.00329.x
DO - 10.1111/j.1551-2916.2005.00329.x
M3 - Article
AN - SCOPUS:27644464271
VL - 88
SP - 1171
EP - 1174
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
SN - 0002-7820
IS - 5
ER -