Variation of the confocal parameters of silver nano superlens

Kwangchil Lee, Jaehoon Kim, Haesung Park, Kyoungsik Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the optical lithography technique, the higher aspect ratio is critical as well as small spot size. To achieve higher aspect ratio with the same nano scale spot size, in this report, we control the confocal parameters of Ag superlens by changing the position of lens. In our FDTD (Finite Difference Time Domain) calculation, Drude dispersion is employed to represent the frequency-dependent permittivity of the Ag superlens while the refractive index of Ag matches with the host material, air and PMMA, at the wavelength of 338nm and 360nm. By changing the wavelength from 330nm to 340nm, in addition, we investigated the tunable superlensing effects and the amplification of evanescent wave with Ag slab related to surface plasmon polariton. Consequently, we observed the variation of the confocal parameters of Ag superlens depending on the position and the tunable wavelength in our results.

Original languageEnglish
Title of host publicationPlasmonics
Subtitle of host publicationNanoimaging, Nanofabrication, and Their Applications III
DOIs
Publication statusPublished - 2007 Dec 1
EventPlasmonics: Nanoimaging, Nanofabrication, and Their Applications III - San Diego, CA, United States
Duration: 2007 Aug 282007 Aug 30

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6642
ISSN (Print)0277-786X

Other

OtherPlasmonics: Nanoimaging, Nanofabrication, and Their Applications III
CountryUnited States
CitySan Diego, CA
Period07/8/2807/8/30

Fingerprint

Confocal
Silver
silver
Wavelength
high aspect ratio
Aspect Ratio
Aspect ratio
wavelengths
Optical Lithography
Surface Plasmon Polariton
Evanescent Wave
Finite-difference Time-domain (FDTD)
evanescent waves
Photolithography
Permittivity
Polymethyl Methacrylate
Amplification
polaritons
Refractive Index
Lens

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Lee, K., Kim, J., Park, H., & Kim, K. (2007). Variation of the confocal parameters of silver nano superlens. In Plasmonics: Nanoimaging, Nanofabrication, and Their Applications III [66421D] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6642). https://doi.org/10.1117/12.734236
Lee, Kwangchil ; Kim, Jaehoon ; Park, Haesung ; Kim, Kyoungsik. / Variation of the confocal parameters of silver nano superlens. Plasmonics: Nanoimaging, Nanofabrication, and Their Applications III. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).
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Lee, K, Kim, J, Park, H & Kim, K 2007, Variation of the confocal parameters of silver nano superlens. in Plasmonics: Nanoimaging, Nanofabrication, and Their Applications III., 66421D, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6642, Plasmonics: Nanoimaging, Nanofabrication, and Their Applications III, San Diego, CA, United States, 07/8/28. https://doi.org/10.1117/12.734236

Variation of the confocal parameters of silver nano superlens. / Lee, Kwangchil; Kim, Jaehoon; Park, Haesung; Kim, Kyoungsik.

Plasmonics: Nanoimaging, Nanofabrication, and Their Applications III. 2007. 66421D (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6642).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lee K, Kim J, Park H, Kim K. Variation of the confocal parameters of silver nano superlens. In Plasmonics: Nanoimaging, Nanofabrication, and Their Applications III. 2007. 66421D. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.734236