Abstract
We investigated various approaches to enhance the electrical performance and stability of oxide thin-film transistors (TFTs) fabricated with vacuum- and solution-process: vertically graded oxygen vacancy active layer (VGA) by control of oxygen partial pressure, sequential pressure annealing (SPA), and hydrogen peroxide activation (HPA) using ultraviolet irradiation. By adopting these techniques, we could effectively control the defect densities in active layer which resulted in high performance and stable oxide TFTs.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices |
| Subtitle of host publication | TFT Technologies and FPD Materials |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 25-28 |
| Number of pages | 4 |
| ISBN (Electronic) | 9784863484771 |
| DOIs | |
| Publication status | Published - 2015 Jul 30 |
| Event | 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015 - Kyoto, Japan Duration: 2015 Jul 1 → 2015 Jul 4 |
Publication series
| Name | Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials |
|---|
Other
| Other | 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015 |
|---|---|
| Country | Japan |
| City | Kyoto |
| Period | 15/7/1 → 15/7/4 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
Cite this
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Various approaches for high performance and stable oxide thin-film transistors. / Kim, Yeong Gyu; Na, Jae Won; Kim, Won Gi; Kim, Hyun Jae.
Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Institute of Electrical and Electronics Engineers Inc., 2015. p. 25-28 7173187 (Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Various approaches for high performance and stable oxide thin-film transistors
AU - Kim, Yeong Gyu
AU - Na, Jae Won
AU - Kim, Won Gi
AU - Kim, Hyun Jae
PY - 2015/7/30
Y1 - 2015/7/30
N2 - We investigated various approaches to enhance the electrical performance and stability of oxide thin-film transistors (TFTs) fabricated with vacuum- and solution-process: vertically graded oxygen vacancy active layer (VGA) by control of oxygen partial pressure, sequential pressure annealing (SPA), and hydrogen peroxide activation (HPA) using ultraviolet irradiation. By adopting these techniques, we could effectively control the defect densities in active layer which resulted in high performance and stable oxide TFTs.
AB - We investigated various approaches to enhance the electrical performance and stability of oxide thin-film transistors (TFTs) fabricated with vacuum- and solution-process: vertically graded oxygen vacancy active layer (VGA) by control of oxygen partial pressure, sequential pressure annealing (SPA), and hydrogen peroxide activation (HPA) using ultraviolet irradiation. By adopting these techniques, we could effectively control the defect densities in active layer which resulted in high performance and stable oxide TFTs.
UR - http://www.scopus.com/inward/record.url?scp=84947909337&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84947909337&partnerID=8YFLogxK
U2 - 10.1109/AM-FPD.2015.7173187
DO - 10.1109/AM-FPD.2015.7173187
M3 - Conference contribution
AN - SCOPUS:84947909337
T3 - Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials
SP - 25
EP - 28
BT - Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices
PB - Institute of Electrical and Electronics Engineers Inc.
ER -