Verilog-A behavioral model for resonance-modulated silicon micro-ring modulator

We present an accurate behavior model for Si micro-ring modulators (MRM) based on Verilog-A, a standard simulation tool for electronic system design. Our model describes the electrical characteristics of the Si MRM using an equivalent circuit and the optical characteristics based on the couple-mode theory. The accuracy of our model is confirmed by comparing simulation results of our behavior model with the measurement results of a fabricated Si MRM. With this behavior model, cosimulation of Si MRM and electronic driving circuits in the standard electronic design environment can be easily performed.