Wafer-scale high-resolution patterning of reduced graphene oxide films for detection of low concentration biomarkers in plasma

Jinsik Kim, Myung Sic Chae, Sung Min Lee, Dahye Jeong, Byung Chul Lee, Jeong Hoon Lee, Youngsoo Kim, Suk Tai Chang, Kyo Seon Hwang

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17 Citations (Scopus)


Given that reduced graphene oxide (rGO)-based biosensors allow disposable and repeatable biomarker detection at the point of care, we developed a wafer-scale rGO patterning method with mass productivity, uniformity, and high resolution by conventional micro-electro-mechanical systems (MEMS) techniques. Various rGO patterns were demonstrated with dimensions ranging from 5 μm up to several hundred μm. Manufacture of these patterns was accomplished through the optimization of dry etching conditions. The axis-homogeneity and uniformity were also measured to verify the uniform patternability in 4-inch wafer with dry etching. Over 66.2% of uniform rGO patterns, which have deviation of resistance within range of ±10%, formed the entire wafer. We selected amyloid beta (Aβ) peptides in the plasma of APP/PS1 transgenic mice as a study model and measured the peptide level by resistance changes of highly uniform rGO biosensor arrays. Aβ is a pathological hallmark of Alzheimer's disease and its plasma concentration is in the pg mL â '1 range. The sensor detected the Aβ peptides with ultra-high sensitivity; the LOD was at levels as low as 100 fg mL â '1. Our results provide biological evidences that this wafer-scale high-resolution patterning method can be used in rGO-based electrical diagnostic devices for detection of low-level protein biomarkers in biofluids.

Original languageEnglish
Article number31276
JournalScientific reports
Publication statusPublished - 2016 Oct 8


All Science Journal Classification (ASJC) codes

  • General

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