Abstract
In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the World Tribology Congress III - 2005 |
| Pages | 801-802 |
| Number of pages | 2 |
| Publication status | Published - 2005 Dec 1 |
| Event | 2005 World Tribology Congress III - Washington, D.C., United States Duration: 2005 Sep 12 → 2005 Sep 16 |
Publication series
| Name | Proceedings of the World Tribology Congress III - 2005 |
|---|
Other
| Other | 2005 World Tribology Congress III |
|---|---|
| Country | United States |
| City | Washington, D.C. |
| Period | 05/9/12 → 05/9/16 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
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Wear characteristics of atomic force microscope tips. / Chung, Koo Hyun; Kim, Dae Eun.
Proceedings of the World Tribology Congress III - 2005. 2005. p. 801-802 (Proceedings of the World Tribology Congress III - 2005).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Wear characteristics of atomic force microscope tips
AU - Chung, Koo Hyun
AU - Kim, Dae Eun
PY - 2005/12/1
Y1 - 2005/12/1
N2 - In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.
AB - In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.
UR - http://www.scopus.com/inward/record.url?scp=33144486560&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33144486560&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33144486560
SN - 0791842029
T3 - Proceedings of the World Tribology Congress III - 2005
SP - 801
EP - 802
BT - Proceedings of the World Tribology Congress III - 2005
ER -