Wear characteristics of atomic force microscope tips

Koo Hyun Chung; Dae Eun Kim

Wear characteristics of atomic force microscope tips

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.

Original language	English
Title of host publication	Proceedings of the World Tribology Congress III - 2005
Pages	801-802
Number of pages	2
Publication status	Published - 2005
Event	2005 World Tribology Congress III - Washington, D.C., United States Duration: 2005 Sep 12 → 2005 Sep 16

Publication series

Name	Proceedings of the World Tribology Congress III - 2005

Other

Other	2005 World Tribology Congress III
Country	United States
City	Washington, D.C.
Period	05/9/12 → 05/9/16

All Science Journal Classification (ASJC) codes

Engineering(all)

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Chung, K. H., & Kim, D. E. (2005). Wear characteristics of atomic force microscope tips. In Proceedings of the World Tribology Congress III - 2005 (pp. 801-802). (Proceedings of the World Tribology Congress III - 2005).

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title = "Wear characteristics of atomic force microscope tips",

abstract = "In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.",

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year = "2005",

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series = "Proceedings of the World Tribology Congress III - 2005",

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AU - Chung, Koo Hyun

AU - Kim, Dae Eun

PY - 2005

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N2 - In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.

AB - In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.

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