Wear characteristics of atomic force microscope tips

Koo Hyun Chung, Dae Eun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.

Original languageEnglish
Title of host publicationProceedings of the World Tribology Congress III - 2005
Pages801-802
Number of pages2
Publication statusPublished - 2005 Dec 1
Event2005 World Tribology Congress III - Washington, D.C., United States
Duration: 2005 Sep 122005 Sep 16

Publication series

NameProceedings of the World Tribology Congress III - 2005

Other

Other2005 World Tribology Congress III
CountryUnited States
CityWashington, D.C.
Period05/9/1205/9/16

Fingerprint

Microscopes
Wear of materials
Electron microscopes
Silicon nitride
Nanotechnology
Field emission
Diamonds
Scanning
Silicon

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Chung, K. H., & Kim, D. E. (2005). Wear characteristics of atomic force microscope tips. In Proceedings of the World Tribology Congress III - 2005 (pp. 801-802). (Proceedings of the World Tribology Congress III - 2005).
Chung, Koo Hyun ; Kim, Dae Eun. / Wear characteristics of atomic force microscope tips. Proceedings of the World Tribology Congress III - 2005. 2005. pp. 801-802 (Proceedings of the World Tribology Congress III - 2005).
@inproceedings{c87aa795518246b49b111a12ec557afb,
title = "Wear characteristics of atomic force microscope tips",
abstract = "In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.",
author = "Chung, {Koo Hyun} and Kim, {Dae Eun}",
year = "2005",
month = "12",
day = "1",
language = "English",
isbn = "0791842029",
series = "Proceedings of the World Tribology Congress III - 2005",
pages = "801--802",
booktitle = "Proceedings of the World Tribology Congress III - 2005",

}

Chung, KH & Kim, DE 2005, Wear characteristics of atomic force microscope tips. in Proceedings of the World Tribology Congress III - 2005. Proceedings of the World Tribology Congress III - 2005, pp. 801-802, 2005 World Tribology Congress III, Washington, D.C., United States, 05/9/12.

Wear characteristics of atomic force microscope tips. / Chung, Koo Hyun; Kim, Dae Eun.

Proceedings of the World Tribology Congress III - 2005. 2005. p. 801-802 (Proceedings of the World Tribology Congress III - 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Wear characteristics of atomic force microscope tips

AU - Chung, Koo Hyun

AU - Kim, Dae Eun

PY - 2005/12/1

Y1 - 2005/12/1

N2 - In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.

AB - In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard's wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.

UR - http://www.scopus.com/inward/record.url?scp=33144486560&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33144486560&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33144486560

SN - 0791842029

T3 - Proceedings of the World Tribology Congress III - 2005

SP - 801

EP - 802

BT - Proceedings of the World Tribology Congress III - 2005

ER -

Chung KH, Kim DE. Wear characteristics of atomic force microscope tips. In Proceedings of the World Tribology Congress III - 2005. 2005. p. 801-802. (Proceedings of the World Tribology Congress III - 2005).