Wear characteristics of microscopic bushings for MEMS applications investigated by an AFM

Koo Hyun Chung, Cheol Eun Jang, Dae Eun Kim

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The wear characteristics of silicon-based materials that are widely utilized in MEMS applications were investigated. Silicon (1 0 0), silicon oxide, silicon nitride and polysilicon specimens with microscopic bushings were fabricated for the wear tests performed under 100 νN normal force. The wear tests were conducted for a relatively long sliding distance of 5.6-187 km. Following the sliding experiment, the wear characteristics of the bushings were assessed by using an atomic force microscope. It was found that the wear rate was highest for the silicon oxide specimens and decreased in the order of polysilicon, silicon (1 0 0) and silicon nitride. Observation of the wear region showed that the scratches due to wear particles were often formed on the silicon (1 0 0), silicon oxide and polysilicon specimens. However, silicon nitride specimens showed signs of burnishing wear. The wear coefficients of the specimens were in the order of 10-8 to 10-7. Based on the wear characteristics and the wear debris behavior, the application of microgrooves for wear debris removal at the contacting interface was proposed.

Original languageEnglish
Pages (from-to)1877-1887
Number of pages11
JournalJournal of Micromechanics and Microengineering
Volume17
Issue number9
DOIs
Publication statusPublished - 2007 Sep 1

Fingerprint

bushings
Bushings
microelectromechanical systems
MEMS
Wear of materials
atomic force microscopy
Silicon
silicon oxides
silicon nitrides
Silicon oxides
Silicon nitride
Polysilicon
wear tests
silicon
debris
sliding
Debris
Burnishing
microscopes

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

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abstract = "The wear characteristics of silicon-based materials that are widely utilized in MEMS applications were investigated. Silicon (1 0 0), silicon oxide, silicon nitride and polysilicon specimens with microscopic bushings were fabricated for the wear tests performed under 100 νN normal force. The wear tests were conducted for a relatively long sliding distance of 5.6-187 km. Following the sliding experiment, the wear characteristics of the bushings were assessed by using an atomic force microscope. It was found that the wear rate was highest for the silicon oxide specimens and decreased in the order of polysilicon, silicon (1 0 0) and silicon nitride. Observation of the wear region showed that the scratches due to wear particles were often formed on the silicon (1 0 0), silicon oxide and polysilicon specimens. However, silicon nitride specimens showed signs of burnishing wear. The wear coefficients of the specimens were in the order of 10-8 to 10-7. Based on the wear characteristics and the wear debris behavior, the application of microgrooves for wear debris removal at the contacting interface was proposed.",
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Wear characteristics of microscopic bushings for MEMS applications investigated by an AFM. / Chung, Koo Hyun; Jang, Cheol Eun; Kim, Dae Eun.

In: Journal of Micromechanics and Microengineering, Vol. 17, No. 9, 01.09.2007, p. 1877-1887.

Research output: Contribution to journalArticle

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