Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme

Youngkyu Park; Kyoung Eop Kim; Seong Jin Kim; June Gyu Park; Young Hun Joo; Bu Hyun Shin; Seung Yop Lee; Kyuman Cho

doi:10.1364/OL.36.003112

Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme

Youngkyu Park, Kyoung Eop Kim, Seong Jin Kim, June Gyu Park, Young Hun Joo, Bu Hyun Shin, Seung Yop Lee, Kyuman Cho

Department of Astronomy

Research output: Contribution to journal › Article › peer-review

Abstract

A scanning heterodyne I/Q-interferometer scheme is proposed to overcome phase ambiguity caused by the periodic nature of its phase-dependent signal. A position sensing scheme using an astigmatic method in the confocal arrangement has been interfaced to the interferometer to retrieve the real phase value during a scanning process. The experimental results show that the vertical measurement range can be expanded up to 16 ?m. The potential of this interferometer on the scanning microscopy of a rough surface is discussed.

Original language	English
Pages (from-to)	3112-3114
Number of pages	3
Journal	Optics Letters
Volume	36
Issue number	16
DOIs	https://doi.org/10.1364/OL.36.003112
Publication status	Published - 2011 Aug 15

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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10.1364/OL.36.003112

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title = "Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme",

abstract = "A scanning heterodyne I/Q-interferometer scheme is proposed to overcome phase ambiguity caused by the periodic nature of its phase-dependent signal. A position sensing scheme using an astigmatic method in the confocal arrangement has been interfaced to the interferometer to retrieve the real phase value during a scanning process. The experimental results show that the vertical measurement range can be expanded up to 16 ?m. The potential of this interferometer on the scanning microscopy of a rough surface is discussed.",

author = "Youngkyu Park and Kim, {Kyoung Eop} and Kim, {Seong Jin} and Park, {June Gyu} and Joo, {Young Hun} and Shin, {Bu Hyun} and Lee, {Seung Yop} and Kyuman Cho",

year = "2011",

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doi = "10.1364/OL.36.003112",

language = "English",

volume = "36",

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AU - Park, Youngkyu

AU - Kim, Kyoung Eop

AU - Kim, Seong Jin

AU - Park, June Gyu

AU - Joo, Young Hun

AU - Shin, Bu Hyun

AU - Lee, Seung Yop

AU - Cho, Kyuman

PY - 2011/8/15

Y1 - 2011/8/15

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AB - A scanning heterodyne I/Q-interferometer scheme is proposed to overcome phase ambiguity caused by the periodic nature of its phase-dependent signal. A position sensing scheme using an astigmatic method in the confocal arrangement has been interfaced to the interferometer to retrieve the real phase value during a scanning process. The experimental results show that the vertical measurement range can be expanded up to 16 ?m. The potential of this interferometer on the scanning microscopy of a rough surface is discussed.

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JO - Optics Letters

JF - Optics Letters

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Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme

Abstract

All Science Journal Classification (ASJC) codes

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