Wideband micromachined transitions for MEMS tunable high-Q filters

Alexandras Margomenos, Yongshik Lee, Alok Jain, Terry Yao, Dimitris Peroulis, Linda P.B. Katehi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Two types of micromachined RF transitions for interconnecting Coplanar Waveguides (CPW) on silicon to Microstrip lines suspended on membranes are presented. These transitions are a critical component for developing MEMS tunable high-Q filters for Ka and U-band applications. Their fabrication is based on a DRIE etching process which provides excellent control of the size and shape of the etched structure, therefore excellent control of the transition's RF performance. The presented transitions have sufficient bandwidth for covering the 35-55 GHz range within which the MEMS tunable filters will be operating.

Original languageEnglish
Title of host publicationProceedings of the 36th European Microwave Conference, EuMC 2006
Pages1336-1339
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event36th European Microwave Conference, EuMC 2006 - Manchester, United Kingdom
Duration: 2006 Sep 102006 Sep 12

Publication series

NameProceedings of the 36th European Microwave Conference, EuMC 2006

Other

Other36th European Microwave Conference, EuMC 2006
CountryUnited Kingdom
CityManchester
Period06/9/1006/9/12

Fingerprint

microelectromechanical systems
MEMS
Q factors
broadband
filters
Coplanar waveguides
Microstrip lines
Etching
Membranes
Bandwidth
Fabrication
Silicon
tunable filters
coverings
etching
membranes
waveguides
bandwidth
fabrication
silicon

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Radiation

Cite this

Margomenos, A., Lee, Y., Jain, A., Yao, T., Peroulis, D., & Katehi, L. P. B. (2007). Wideband micromachined transitions for MEMS tunable high-Q filters. In Proceedings of the 36th European Microwave Conference, EuMC 2006 (pp. 1336-1339). [4058079] (Proceedings of the 36th European Microwave Conference, EuMC 2006). https://doi.org/10.1109/EUMC.2006.281263
Margomenos, Alexandras ; Lee, Yongshik ; Jain, Alok ; Yao, Terry ; Peroulis, Dimitris ; Katehi, Linda P.B. / Wideband micromachined transitions for MEMS tunable high-Q filters. Proceedings of the 36th European Microwave Conference, EuMC 2006. 2007. pp. 1336-1339 (Proceedings of the 36th European Microwave Conference, EuMC 2006).
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Margomenos, A, Lee, Y, Jain, A, Yao, T, Peroulis, D & Katehi, LPB 2007, Wideband micromachined transitions for MEMS tunable high-Q filters. in Proceedings of the 36th European Microwave Conference, EuMC 2006., 4058079, Proceedings of the 36th European Microwave Conference, EuMC 2006, pp. 1336-1339, 36th European Microwave Conference, EuMC 2006, Manchester, United Kingdom, 06/9/10. https://doi.org/10.1109/EUMC.2006.281263

Wideband micromachined transitions for MEMS tunable high-Q filters. / Margomenos, Alexandras; Lee, Yongshik; Jain, Alok; Yao, Terry; Peroulis, Dimitris; Katehi, Linda P.B.

Proceedings of the 36th European Microwave Conference, EuMC 2006. 2007. p. 1336-1339 4058079 (Proceedings of the 36th European Microwave Conference, EuMC 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Margomenos A, Lee Y, Jain A, Yao T, Peroulis D, Katehi LPB. Wideband micromachined transitions for MEMS tunable high-Q filters. In Proceedings of the 36th European Microwave Conference, EuMC 2006. 2007. p. 1336-1339. 4058079. (Proceedings of the 36th European Microwave Conference, EuMC 2006). https://doi.org/10.1109/EUMC.2006.281263