TY - GEN
T1 - Wideband micromachined transitions for MEMS tunable high-Q filters
AU - Margomenos, Alexandras
AU - Lee, Yongshik
AU - Jain, Alok
AU - Yao, Terry
AU - Peroulis, Dimitris
AU - Katehi, Linda P.B.
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Two types of micromachined RF transitions for interconnecting Coplanar Waveguides (CPW) on silicon to Microstrip lines suspended on membranes are presented. These transitions are a critical component for developing MEMS tunable high-Q filters for Ka and U-band applications. Their fabrication is based on a DRIE etching process which provides excellent control of the size and shape of the etched structure, therefore excellent control of the transition's RF performance. The presented transitions have sufficient bandwidth for covering the 35-55 GHz range within which the MEMS tunable filters will be operating.
AB - Two types of micromachined RF transitions for interconnecting Coplanar Waveguides (CPW) on silicon to Microstrip lines suspended on membranes are presented. These transitions are a critical component for developing MEMS tunable high-Q filters for Ka and U-band applications. Their fabrication is based on a DRIE etching process which provides excellent control of the size and shape of the etched structure, therefore excellent control of the transition's RF performance. The presented transitions have sufficient bandwidth for covering the 35-55 GHz range within which the MEMS tunable filters will be operating.
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U2 - 10.1109/EUMC.2006.281263
DO - 10.1109/EUMC.2006.281263
M3 - Conference contribution
SN - 2960055160
SN - 9782960055160
T3 - Proceedings of the 36th European Microwave Conference, EuMC 2006
SP - 1336
EP - 1339
BT - Proceedings of the 36th European Microwave Conference, EuMC 2006
T2 - 36th European Microwave Conference, EuMC 2006
Y2 - 10 September 2006 through 12 September 2006
ER -