WO3-MoS2 Mixture-Based Gas Sensor for NO2 Detection at Room Temperature

Dae Hyun Baek, Gyujun Choi, Yeunjun Kwak, Byeong Hwa Cho, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a WO3-MoS2 mixture-based gas sensor showing the response to NO2 and complete recovery in air at room temperature for the first time. When n-type WO3 and p-type MoS2 meet, a p-n junction with an electron depletion zone is formed at the interface due to the electron transfer induced by the difference in work function. This electron depletion zone prevents MoS2 from bonding directly with oxygen, thus preventing electrical instability in air that conventional MoS2-based sensors inevitably have and allowing them to respond and fully recover in air at room temperature. Here, unlike other MoS2-based sensors, the fabricated WO3-MoS2 mixture-based sensors showed complete recovery after exposure to NO2 in air at room temperature, which means that the fabricated sensor can be operated at low power without the heaters.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages468-471
Number of pages4
ISBN (Electronic)9781728116105
DOIs
Publication statusPublished - 2019 Jan
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 2019 Jan 272019 Jan 31

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period19/1/2719/1/31

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Baek, D. H., Choi, G., Kwak, Y., Cho, B. H., & Kim, J. (2019). WO3-MoS2 Mixture-Based Gas Sensor for NO2 Detection at Room Temperature. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 468-471). [8870680] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870680