Zinc-tin-oxide thin-film transistors and circuits by ink-jet printing

Yong Hoon Kim, Min Suk Oh, Kwang Ho Kim, Hyun Jae Kim, Min Koo Han, Sung Kyu Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High performance amorphous zinc-tin-oxide (a-ZTO) thin film transistors (TFTs) and simple inverter circuits have been developed by using ink-jet printing and rapid thermal annealing (RTA) process. It was found that the substrate heating during ink-jet process had significant influence on ZTO channel morphology and the electrical properties. The TFT devices with a-ZTO layer printed at 50°C showed the best electrical performance (μ=4.98 cm2/Vs, Ion/off=109). Also, a-ZTO TFT based inverter was fabricated with acceptable logic level conservation.

Original languageEnglish
Title of host publication10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010
Pages480-481
Number of pages2
Publication statusPublished - 2010 Dec 1
Event10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010 - Seoul, Korea, Republic of
Duration: 2010 Oct 112010 Oct 15

Publication series

NameProceedings of International Meeting on Information Display
ISSN (Print)1738-7558

Other

Other10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010
CountryKorea, Republic of
CitySeoul
Period10/10/1110/10/15

Fingerprint

Thin film circuits
Ink jet printing
Thin film transistors
Zinc oxide
Tin oxides
Oxide films
Rapid thermal annealing
Ink
Conservation
Electric properties
Heating
Networks (circuits)
Ions
Substrates

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Kim, Y. H., Oh, M. S., Kim, K. H., Kim, H. J., Han, M. K., & Park, S. K. (2010). Zinc-tin-oxide thin-film transistors and circuits by ink-jet printing. In 10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010 (pp. 480-481). (Proceedings of International Meeting on Information Display).
Kim, Yong Hoon ; Oh, Min Suk ; Kim, Kwang Ho ; Kim, Hyun Jae ; Han, Min Koo ; Park, Sung Kyu. / Zinc-tin-oxide thin-film transistors and circuits by ink-jet printing. 10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010. 2010. pp. 480-481 (Proceedings of International Meeting on Information Display).
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abstract = "High performance amorphous zinc-tin-oxide (a-ZTO) thin film transistors (TFTs) and simple inverter circuits have been developed by using ink-jet printing and rapid thermal annealing (RTA) process. It was found that the substrate heating during ink-jet process had significant influence on ZTO channel morphology and the electrical properties. The TFT devices with a-ZTO layer printed at 50°C showed the best electrical performance (μ=4.98 cm2/Vs, Ion/off=109). Also, a-ZTO TFT based inverter was fabricated with acceptable logic level conservation.",
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Kim, YH, Oh, MS, Kim, KH, Kim, HJ, Han, MK & Park, SK 2010, Zinc-tin-oxide thin-film transistors and circuits by ink-jet printing. in 10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010. Proceedings of International Meeting on Information Display, pp. 480-481, 10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010, Seoul, Korea, Republic of, 10/10/11.

Zinc-tin-oxide thin-film transistors and circuits by ink-jet printing. / Kim, Yong Hoon; Oh, Min Suk; Kim, Kwang Ho; Kim, Hyun Jae; Han, Min Koo; Park, Sung Kyu.

10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010. 2010. p. 480-481 (Proceedings of International Meeting on Information Display).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Kim YH, Oh MS, Kim KH, Kim HJ, Han MK, Park SK. Zinc-tin-oxide thin-film transistors and circuits by ink-jet printing. In 10th International Meeting on Information Display and International Display Manufacturing Conference and Asia Display 2010, IMID/IDMC/ASIA Display 2010. 2010. p. 480-481. (Proceedings of International Meeting on Information Display).